SiGeC/Si superlattice microcoolers
نویسندگان
چکیده
منابع مشابه
SiGeCÕSi superlattice microcoolers
Monolithically integrated active cooling is an attractive way for thermal management and temperature stabilization of microelectronic and optoelectronic devices. SiGeC can be lattice matched to Si and is a promising material for integrated coolers. SiGeC/Si superlattice structures were grown on Si substrates by molecular beam epitaxy. Thermal conductivity was measured by the 3v method. SiGeC/Si...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2001
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.1356455